PECVD of Hexamethyldisiloxane Coatings Using Extremely Asymmetric Capacitive RF Discharge

Deposition and characterization of silicon carbon nitride films prepared by RF-PECVD with capacitive coupling

The goals of this work were to synthesize stoichiometric silicon carbon nitride (Si1.5C1.5N4) films using the RF-PECVD method and to characterize the deposited material. Gas mixtures, as opposed to an organic monomer, were chosen for reactants. Gas mixtures allow for varying the concentration of the elements needed for silicon carbon nitride synthesis and thereby optimizing the composition of t...

Mechanical Design of RF MEMS Capacitive Switches

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

Time Characterization of Capacitive Mems Rf Switches

Plasma Density Distribution in Asymmetric Geometry Capacitive Coupled Plasma Discharge System

In this work, we used the single Langmuir probe to measure the plasma density distribution in an geometrically asymmetric capacitive coupled plasma discharge system. Because of the frame structure of powered electrode, the plasma density was not homogeneous in the discharge volume. It was higher under the frame, but lower in the centre. Finite element simulation results showed a good agreement ...

Structure of Velocity Distribution of Sheath-Accelerated Secondary Electrons in an Asymmetric RF-DC Discharge

Low-pressure capacitively-coupled discharges with an additional DC bias applied to a separate electrode are important for plasma-assisted etching for semiconductor device manufacturing. Measurements of the electron velocity distribution function (EVDF) impinging on the wafer and in the plasma bulk show complex structure of EVDF with multiple peaks and steps. These features in the electron energ...